DEPOSISI DAN KARAKTERISASI  FILM TIPIS CdS/CdTe:Cu YANG DITUMBUHKAN  DENGAN METODE DC MAGNETRON SPUTTERING

Syamsul Hadi; Putut Marwoto; Ngurah Made D.P

Syamsul Hadi Jurusan Fisika, Fakultas Matematika dan Ilmu Pengetahuan Alam, Universitas Negeri Semarang
Putut Marwoto Jurusan Fisika, Fakultas Matematika dan Ilmu Pengetahuan Alam, Universitas Negeri Semarang
Ngurah Made D.P Jurusan Fisika, Fakultas Matematika dan Ilmu Pengetahuan Alam, Universitas Negeri Semarang

Keywords: CdS/CdTe, Cu thin film, Cu doping, morphological structure, optical properties, electrical properties

Abstract

CdS/CdTe:Cu thin film have been deposited on the ITO substrates by homemade dc magnetron sputtering method. This research was carried out in order to determine the influence of Cu doping on the morphological structure, optical and electrical properties of CdS/CdTe thin film. This study was done by varying Cu concentrations i.e. 2% and 5%. At same of deposition parameters doped by Cu causes morphology of film becomes more homogen and increases absorption coefficient, decreases resistivity, and increases film conductivity. Electrical characteristic performances of film show an ideal p-n junction. CdS/CdTe:Cu thin film with best qualities of morphological structure, optical and electrical properties are suitable for solar cell aplications.

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